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Modeling and Simulation of a Parametrically Resonant Micromirror With Duty-Cycled Excitation
High frequency large scanning angle electrostatically actuated microelectromechanical systems (MEMS) mirrors are used in a variety of applications involving fast optical scanning. A 1-D parametrically resonant torsional micromirror for use in biomedical imaging is analyzed here with respect to opera...
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| Published in: | J Microelectromech Syst |
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| Main Authors: | , , , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
2014
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4262121/ https://ncbi.nlm.nih.gov/pubmed/25506188 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2014.2315518 |
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