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Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic se...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:Sensors (Basel)
Hauptverfasser: He, Fei, Liao, Yang, Lin, Jintian, Song, Jiangxin, Qiao, Lingling, Cheng, Ya, Sugioka, Koji
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2014
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4239949/
https://ncbi.nlm.nih.gov/pubmed/25330047
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s141019402
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