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Effect of sulfur hexafluoride gas and post-annealing treatment for inductively coupled plasma etched barium titanate thin films
Aerosol deposition- (AD) derived barium titanate (BTO) micropatterns are etched via SF(6)/O(2)/Ar plasmas using inductively coupled plasma (ICP) etching technology. The reaction mechanisms of the sulfur hexafluoride on BTO thin films and the effects of annealing treatment are verified through X-ray...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4171574/ https://ncbi.nlm.nih.gov/pubmed/25249824 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-496 |
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