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Released micromachined beams utilizing laterally uniform porosity porous silicon
Suspended micromachined porous silicon beams with laterally uniform porosity are reported, which have been fabricated using standard photolithography processes designed for compatibility with complementary metal-oxide-semiconductor (CMOS) processes. Anodization, annealing, reactive ion etching, repe...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4151280/ https://ncbi.nlm.nih.gov/pubmed/25221457 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-426 |
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