A carregar...
Multilayer porous silicon diffraction gratings operating in the infrared
Transmission diffraction gratings operating at 1,565 nm based on multilayer porous silicon films are modeled, fabricated, and tested. Features down to 2 μm have been patterned into submicron-thick mesoporous films using standard photolithographic and dry etching techniques. After patterning of the t...
Na minha lista:
| Main Authors: | , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3519758/ https://ncbi.nlm.nih.gov/pubmed/23176591 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-645 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|