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Electron-beam induced deposition and autocatalytic decomposition of Co(CO)(3)NO
The autocatalytic growth of arbitrarily shaped nanostructures fabricated by electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) is studied for two precursors: iron pentacarbonyl, Fe(CO)(5), and cobalt tricarbonyl nitrosyl, Co(CO)(3)NO. Different deposits are...
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| Autores principales: | , , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Beilstein-Institut
2014
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4143096/ https://ncbi.nlm.nih.gov/pubmed/25161851 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.5.129 |
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