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Simulation of electron transport during electron-beam-induced deposition of nanostructures
We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of tungsten nanostructures on SiO(2) substrates by using a Monte Carlo simulation of the electron transport. This study gives a quantitative insight into the deposition of energy and charge in...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Beilstein-Institut
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3869256/ https://ncbi.nlm.nih.gov/pubmed/24367747 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.4.89 |
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