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High responsivity, low dark current, heterogeneously integrated thin film Si photodetectors on rigid and flexible substrates
We report thin film single crystal silicon photodetectors (PDs), composed of 13- 25 μm thick silicon, heterogeneously bonded to transparent Pyrex® and flexible Kapton® substrates. The measured responsivity and dark current density of the PDs on pyrex is 0.19 A/W – 0.34 A/W (λ = 470 nm – 600 nm) and...
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| Asıl Yazarlar: | , , |
|---|---|
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Optical Society of America
2014
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| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4086330/ https://ncbi.nlm.nih.gov/pubmed/24663844 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1364/OE.22.005052 |
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