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Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window
We fabricated transparent and flexible silicon oxycarbide (SiOC) hard coating (HC) films on a colorless polyimide substrate to use as cover window films for flexible and foldable displays using a reactive roll-to-roll (R2R) sputtering system at room temperature. At a SiOC thickness of 100 nm, the R2...
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| Publicado en: | Micromachines (Basel) |
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| Autores principales: | , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7996484/ https://ncbi.nlm.nih.gov/pubmed/33668908 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12030233 |
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