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Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores
Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2004
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4076156/ https://ncbi.nlm.nih.gov/pubmed/24991194 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl0494001 |
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