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Sub-15-nm patterning of asymmetric metal electrodes and devices by adhesion lithography

Coplanar electrodes formed from asymmetric metals separated on the nanometre length scale are essential elements of nanoscale photonic and electronic devices. Existing fabrication methods typically involve electron-beam lithography—a technique that enables high fidelity patterning but suffers from s...

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Detalhes bibliográficos
Main Authors: Beesley, David J., Semple, James, Krishnan Jagadamma, Lethy, Amassian, Aram, McLachlan, Martyn A., Anthopoulos, Thomas D., deMello, John C.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Pub. Group 2014
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4050269/
https://ncbi.nlm.nih.gov/pubmed/24861953
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/ncomms4933
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