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Direct thermal-UV nanoimprint of an iron-containing organometallic hybrid film
Direct thermal-UV nanoimprinting of an organometallic hybrid film has been demonstrated to fabricate nanoscale features into a novel organic-inorganic solution containing selected metals. The film can be patterned at low temperature and pressure, and requires only a short processing time. When analy...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Vacuum Society
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4043146/ https://ncbi.nlm.nih.gov/pubmed/24932434 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.3271337 |
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