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Effect of mold treatment by solvent on PDMS molding into nanoholes
Polydimethylsiloxane (PDMS) is the most popular and versatile material for soft lithography due to its flexibility and easy fabrication by molding process. However, for nanoscale patterns, it is challenging to fill uncured PDMS into the holes or trenches on the master mold that is coated with a sila...
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| Main Authors: | , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Springer
2013
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4015600/ https://ncbi.nlm.nih.gov/pubmed/24059263 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-394 |
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