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Improvement in pH Sensitivity of Low-Temperature Polycrystalline-Silicon Thin-Film Transistor Sensors Using H(2) Sintering
In this article, we report an improvement in the pH sensitivity of low-temperature polycrystalline-silicon (poly-Si) thin-film transistor (TFT) sensors using an H(2) sintering process. The low-temperature polycrystalline-silicon (LTPS) TFT sensor with H(2) sintering exhibited a high sensitivity than...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4003917/ https://ncbi.nlm.nih.gov/pubmed/24573308 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140303825 |
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