SELF ALIGNED TIP DEINSULATION OF ATOMIC LAYER DEPOSITED AL(2)O(3) AND PARYLENE C COATED UTAH ELECTRODE ARRAY BASED NEURAL INTERFACES

The recently developed alumina and Parylene C bi-layer encapsulation improved the lifetime of neural interfaces. Tip deinsulation of Utah electrode array based neural interfaces is challenging due to the complex 3D geometries and high aspect ratios of the devices. A three-step self-aligned process w...

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Detalhes bibliográficos
Main Authors: Xie, Xianzong, Rieth, Loren, Negi, Sandeep, Bhandari, Rajmohan, Caldwell, Ryan, Sharma, Rohit, Tathireddy, Prashant, Solzbacher, Florian
Formato: Artigo
Idioma:Inglês
Publicado em: 2014
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3994722/
https://ncbi.nlm.nih.gov/pubmed/24771981
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/24/3/035003
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