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Plasma-assisted atomic layer deposition of Al(2)O(3) and parylene C bi-layer encapsulation for chronic implantable electronics

Encapsulation of biomedical implants with complex three dimensional geometries is one of the greatest challenges achieving long-term functionality and stability. This report presents an encapsulation scheme that combines Al(2)O(3) by atomic layer deposition with parylene C for implantable electronic...

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Autori principali: Xie, Xianzong, Rieth, Loren, Merugu, Srinivas, Tathireddy, Prashant, Solzbacher, Florian
Natura: Artigo
Lingua:Inglês
Pubblicazione: American Institute of Physics 2012
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC3443113/
https://ncbi.nlm.nih.gov/pubmed/23024377
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.4748322
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