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Fabrication of TiN nanostructure as a hydrogen peroxide sensor by oblique angle deposition

Nanostructured titanium nitride (TiN) films with varying porosity were prepared by the oblique angle deposition technique (OAD). The porosity of films increases as the deposition angle becomes larger. The film obtained at an incident angle of 85° exhibits the best catalytic activity and sensitivity...

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Detalhes bibliográficos
Main Authors: Xie, Zheng, Liu, Xiangxuan, Wang, Weipeng, Liu, Can, Li, Zhengcao, Zhang, Zhengjun
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2014
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3975935/
https://ncbi.nlm.nih.gov/pubmed/24589278
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-105
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