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Template-assisted nanostructure fabrication by glancing angle deposition: a molecular dynamics study

In the present work, we investigate the pre-existing template-assisted glancing angle deposition of Al columnar structures on Cu substrate by means of molecular dynamics simulations, with a focus on examining the effect of deposition-induced template deformation on the morphologies of the fabricated...

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Autors principals: Zhang, Junjie, Cao, Yongzhi, Gao, Qiang, Wu, Chao, Yu, Fuli, Liang, Yingchun
Format: Artigo
Idioma:Inglês
Publicat: Springer 2013
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Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC3733689/
https://ncbi.nlm.nih.gov/pubmed/23826893
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-312
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