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Modeling and Manufacturing of Micromechanical RF Switch with Inductors

This study presents the simulation, fabrication and characterization of micromechanical radio frequency (RF) switch with micro inductors. The inductors are employed to enhance the characteristic of the RF switch. An equivalent circuit model is developed to simulate the performance of the RF switch....

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Bibliographic Details
Main Authors: Dai, Ching-Liang, Chen, Ying-Liang
Format: Artigo
Language:Inglês
Published: Molecular Diversity Preservation International (MDPI) 2007
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC3965228/
https://ncbi.nlm.nih.gov/pubmed/28903253
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