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Dimension Reduction of Multivariable Optical Emission Spectrometer Datasets for Industrial Plasma Processes
A new data dimension-reduction method, called Internal Information Redundancy Reduction (IIRR), is proposed for application to Optical Emission Spectroscopy (OES) datasets obtained from industrial plasma processes. For example in a semiconductor manufacturing environment, real-time spectral emission...
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| Autores principales: | , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3926546/ https://ncbi.nlm.nih.gov/pubmed/24451453 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s140100052 |
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