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Dynamic Characteristics of Micro-Beams Considering the Effect of Flexible Supports

Normally, the boundaries are assumed to allow small deflections and moments for MEMS beams with flexible supports. The non-ideal boundary conditions have a significant effect on the qualitative dynamical behavior. In this paper, by employing the principle of energy equivalence, rigorous theoretical...

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Detalhes bibliográficos
Main Authors: Zhong, Zuo-Yang, Zhang, Wen-Ming, Meng, Guang
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2013
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3892879/
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s131215880
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