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Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test

A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacous...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Zheng, Tianxiang, Chen, Shuo, Lei, Linxu, Deng, Zhanfeng, Zhang, Cheng, Yang, Xing, Zou, Haodong, Xu, Menghan
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6190481/
https://ncbi.nlm.nih.gov/pubmed/30400411
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi8070220
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