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A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure
A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure senso...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , , |
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| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
Molecular Diversity Preservation International (MDPI)
2013
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3892843/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s131217006 |
| Ετικέτες: |
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