Učitavanje...
A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure
A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure senso...
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| Glavni autori: | , , , , |
|---|---|
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
Molecular Diversity Preservation International (MDPI)
2013
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3892843/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s131217006 |
| Oznake: |
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