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Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications
This paper presents a new actuation scheme for in-plane bidirectional translation of polysilicon microelectrodes. The new Chevron-peg actuation scheme uses microelectromechanical systems (MEMS) based electrothermal microactuators to move microelectrodes for brain implant applications. The design cha...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3889018/ https://ncbi.nlm.nih.gov/pubmed/24431926 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2012.2203789 |
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