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Quantitative Boundary Support Characterization for Cantilever MEMS
Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static and dynamic qualities of such microscale devices are directly related to the invariant and variant properties of the microsystem. Among the inv...
Sparad:
| Huvudupphovsmän: | , , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Publicerad: |
Molecular Diversity Preservation International (MDPI)
2007
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| Ämnen: | |
| Länkar: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3864509/ https://ncbi.nlm.nih.gov/pubmed/28903214 |
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