Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications

[Image: see text] We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-paralle...

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Main Authors: Bargatin, I., Myers, E. B., Aldridge, J. S., Marcoux, C., Brianceau, P., Duraffourg, L., Colinet, E., Hentz, S., Andreucci, P., Roukes, M. L.
Format: Artigo
Jezik:Inglês
Izdano: 2012
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Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC3839335/
https://ncbi.nlm.nih.gov/pubmed/22280452
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl2037479
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