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Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications
[Image: see text] We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-paralle...
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| Autors principals: | , , , , , , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2012
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3839335/ https://ncbi.nlm.nih.gov/pubmed/22280452 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/nl2037479 |
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