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Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators
Micromechanical resonators are promising replacements for quartz crystals for timing and frequency references owing to potential for compactness, integrability with CMOS fabrication processes, low cost, and low power consumption. To be used in high performance reference application, resonators shoul...
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| Main Authors: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3832850/ https://ncbi.nlm.nih.gov/pubmed/24247809 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep03244 |
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