Desktop Nanofabrication with Massively Multiplexed Beam Pen Lithography

The development of a lithographic method that can rapidly define nanoscale features across centimeter-scale surfaces has been a long standing goal of the nanotechnology community. If such a ‘desktop nanofab’ could be implemented in a low-cost format, it would bring the possibility of point-of-use na...

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Bibliografiske detaljer
Main Authors: Liao, Xing, Brown, Keith A., Schmucker, Abrin L., Liu, Guoliang, He, Shu, Shim, Wooyoung, Mirkin, Chad A.
Format: Artigo
Sprog:Inglês
Udgivet: 2013
Fag:
Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3807695/
https://ncbi.nlm.nih.gov/pubmed/23868336
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/ncomms3103
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