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Lab-on-CMOS Integration of Microfluidics and Electrochemical Sensors
This paper introduces a CMOS-microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3793889/ https://ncbi.nlm.nih.gov/pubmed/23939616 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/c3lc50437a |
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