Učitavanje...
Lab-on-CMOS Integration of Microfluidics and Electrochemical Sensors
This paper introduces a CMOS-microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved...
Spremljeno u:
| Glavni autori: | , |
|---|---|
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
2013
|
| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3793889/ https://ncbi.nlm.nih.gov/pubmed/23939616 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/c3lc50437a |
| Oznake: |
Dodaj oznaku
Bez oznaka, Budi prvi tko označuje ovaj zapis!
|