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Viscous damping and spring force calculation of regularly perforated MEMS microstructures in the Stokes' approximation
There are a number of applications for microstructure devices consisting of a regular pattern of perforations, and many of these utilize fluid damping. For the analysis of viscous damping and for calculating the spring force in some cases, it is possible to take advantage of the regular hole pattern...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2013
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3776610/ https://ncbi.nlm.nih.gov/pubmed/24058267 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.sna.2013.07.011 |
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