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Viscous damping and spring force calculation of regularly perforated MEMS microstructures in the Stokes' approximation

There are a number of applications for microstructure devices consisting of a regular pattern of perforations, and many of these utilize fluid damping. For the analysis of viscous damping and for calculating the spring force in some cases, it is possible to take advantage of the regular hole pattern...

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Detalhes bibliográficos
Main Authors: Homentcovschi, Dorel, Murray, Bruce T., Miles, Ronald N.
Formato: Artigo
Idioma:Inglês
Publicado em: 2013
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3776610/
https://ncbi.nlm.nih.gov/pubmed/24058267
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.sna.2013.07.011
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