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Viscous damping of perforated planar micromechanical structures

The paper gives an analytical approximation to the viscous damping coefficient due to the motion of a gas between a pair of closely spaced fluctuating plates in which one of the plates contains a regular system of circular holes. These types of structures are important parts of many microelectromech...

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Detalhes bibliográficos
Main Authors: Homentcovschi, D., Miles, R.N.
Formato: Artigo
Idioma:Inglês
Publicado em: 2005
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC2667330/
https://ncbi.nlm.nih.gov/pubmed/19365579
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.sna.2004.10.032
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