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Viscous damping of perforated planar micromechanical structures
The paper gives an analytical approximation to the viscous damping coefficient due to the motion of a gas between a pair of closely spaced fluctuating plates in which one of the plates contains a regular system of circular holes. These types of structures are important parts of many microelectromech...
Gorde:
| Egile Nagusiak: | , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
2005
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2667330/ https://ncbi.nlm.nih.gov/pubmed/19365579 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.sna.2004.10.032 |
| Etiketak: |
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