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Micromachined High Frequency PMN-PT/Epoxy 1-3 Composite Ultrasonic Annular Array
This paper reports the design, fabrication, and performance of miniature micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular arrays. The PMN-PT single crystal 1-3 composites were made with micromachining techniques. The area of a single crystal pillar was 9 μm × 9 μm. The widt...
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| 主要な著者: | , , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
2011
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3774318/ https://ncbi.nlm.nih.gov/pubmed/22119324 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ultras.2011.11.001 |
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