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Electrical Characterization of Microelectromechanical Silicon Carbide Resonators
This manuscript describes the findings of a study to investigate the performance of SiC MEMS resonators with respect to resonant frequency and quality factor under a variety of testing conditions, including various ambient pressures, AC drive voltages, bias potentials and temperatures. The sample se...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2008
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3705528/ https://ncbi.nlm.nih.gov/pubmed/27873838 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s8095759 |
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