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Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors

Nano-structured carbon nitride (CN(x)) films were synthesized by a reactive RF magnetron sputtering system with a DC bias under various deposition conditions, and their physical and electrical properties were investigated with a view to using them for micro humidity sensors. The FTIR spectra of the...

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Hlavní autor: Lee, Sung Pil
Médium: Artigo
Jazyk:Inglês
Vydáno: Molecular Diversity Preservation International (MDPI) 2008
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On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3663008/
https://ncbi.nlm.nih.gov/pubmed/27879777
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