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Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors
Nano-structured carbon nitride (CN(x)) films were synthesized by a reactive RF magnetron sputtering system with a DC bias under various deposition conditions, and their physical and electrical properties were investigated with a view to using them for micro humidity sensors. The FTIR spectra of the...
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Molecular Diversity Preservation International (MDPI)
2008
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3663008/ https://ncbi.nlm.nih.gov/pubmed/27879777 |
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