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Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching
We demonstrated a novel, simple, and low-cost method to fabricate silicon nanowire (SiNW) arrays and silicon nanohole (SiNH) arrays based on thin silver (Ag) film dewetting process combined with metal-assisted chemical etching. Ag mesh with holes and semispherical Ag nanoparticles can be prepared by...
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| Autors principals: | , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Springer
2013
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3645966/ https://ncbi.nlm.nih.gov/pubmed/23557325 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-155 |
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