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Study of Double-Side Ultrasonic Embossing for Fabrication of Microstructures on Thermoplastic Polymer Substrates

Double-side replication of polymer substrates is beneficial to the design and the fabrication of 3-demensional devices. The ultrasonic embossing method is a promising, high efficiency and low cost replication method for thermoplastic substrates. It is convenient to apply silicon molds in ultrasonic...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Luo, Yi, Yan, Xu, Qi, Na, Wang, Xiaodong, Wang, Liangjiang
Format: Artigo
Sprache:Inglês
Veröffentlicht: Public Library of Science 2013
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3632598/
https://ncbi.nlm.nih.gov/pubmed/23630605
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1371/journal.pone.0061647
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