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Reduction of Electron Channeling in EDS using Precession

We demonstrate that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO(3) specimen orientated along [001] zone axis, the measured strontium to titanium atomic ratio was 0.74 – 0.80 using conventional EDS methods, a...

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Bibliografiske detaljer
Main Authors: Liao, Yifeng, Marks, Laurence D.
Format: Artigo
Sprog:Inglês
Udgivet: 2012
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3608828/
https://ncbi.nlm.nih.gov/pubmed/23376402
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ultramic.2012.11.007
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