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Reduction of Electron Channeling in EDS using Precession
We demonstrate that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO(3) specimen orientated along [001] zone axis, the measured strontium to titanium atomic ratio was 0.74 – 0.80 using conventional EDS methods, a...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3608828/ https://ncbi.nlm.nih.gov/pubmed/23376402 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ultramic.2012.11.007 |
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