Mo/Si multilayer-coated amplitude-division beam splitters for XUV radiation sources

Amplitude-division beam splitters for XUV radiation sources have been developed and extensively characterized. Mo/Si multilayer coatings were deposited on 50 nm-thick SiN membranes. By changing the multilayer structure (periodicity, number of bilayers, etc.) the intensity of the reflected and transm...

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Detalhes bibliográficos
Main Authors: Sobierajski, Ryszard, Loch, Rolf Antonie, van de Kruijs, Robbert W. E., Louis, Eric, von Blanckenhagen, Gisela, Gullikson, Eric M., Siewert, Frank, Wawro, Andrzej, Bijkerk, Fred
Formato: Artigo
Idioma:Inglês
Publicado em: International Union of Crystallography 2013
Assuntos:
Research Papers
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3573871/
https://ncbi.nlm.nih.gov/pubmed/23412481
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S0909049512049990
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