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Template-free fabrication of silicon micropillar/nanowire composite structure by one-step etching
A template-free fabrication method for silicon nanostructures, such as silicon micropillar (MP)/nanowire (NW) composite structure is presented. Utilizing an improved metal-assisted electroless etching (MAEE) of silicon in KMnO(4)/AgNO(3)/HF solution and silicon composite nanostructure of the long MP...
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| Autores principales: | , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Springer
2012
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3502600/ https://ncbi.nlm.nih.gov/pubmed/23043719 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-557 |
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