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Highly flexible method for the fabrication of photonic crystal slabs based on the selective formation of porous silicon
A novel fabrication method of Si photonic slabs based on the selective formation of porous silicon is reported. Free-standing square lattices of cylindrical air holes embedded in a Si matrix can be achieved by proton beam irradiation followed by electrochemical etching of Si wafers. The photonic ban...
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| Autori principali: | , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Springer
2012
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3467190/ https://ncbi.nlm.nih.gov/pubmed/22876764 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-449 |
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