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Voice coil-based scanning probe microscopy
We present a novel system for large-area scanning probe microscopy (SPM) measurements based on minimum counter-force linear guidance mechanisms, voice coils, interferometers and fuzzy logic-based feedback loop electronics. It is shown that voice coil-based actuation combined with interferometry can...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3442967/ https://ncbi.nlm.nih.gov/pubmed/22720756 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-332 |
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