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Early stages of growth of gold layers sputter deposited on glass and silicon substrates

Extremely thin gold layers were sputter deposited on glass and silicon substrates, and their thickness and morphology were studied by Rutherford backscattering (RBS) and atomic force microscopy (AFM) methods. The deposited layers change from discontinuous to continuous ones for longer deposition tim...

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Bibliografiska uppgifter
Huvudupphovsmän: Malinský, Petr, Slepička, Petr, Hnatowicz, Vladimír, Švorčík, Václav
Materialtyp: Artigo
Språk:Inglês
Publicerad: Springer 2012
Ämnen:
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC3405445/
https://ncbi.nlm.nih.gov/pubmed/22559151
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-241
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