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Early stages of growth of gold layers sputter deposited on glass and silicon substrates
Extremely thin gold layers were sputter deposited on glass and silicon substrates, and their thickness and morphology were studied by Rutherford backscattering (RBS) and atomic force microscopy (AFM) methods. The deposited layers change from discontinuous to continuous ones for longer deposition tim...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3405445/ https://ncbi.nlm.nih.gov/pubmed/22559151 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-241 |
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