Focused ion beam milling of microchannels in lithium niobate

We present experimental and simulation results for focused ion beam (FIB) milling of microchannels in lithium niobate in this paper. We investigate two different cuts of lithium niobate, Y- and Z-cuts, and observe that the experimental material removal rate in the FIB for both Y-cut and Z-cut sample...

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Bibliographische Detailangaben
Hauptverfasser: Sridhar, Manoj, Maurya, Devendra K., Friend, James R., Yeo, Leslie Y.
Format: Artigo
Sprache:Inglês
Veröffentlicht: American Institute of Physics 2012
Schlagworte:
Special Topic: Selected Papers from the Second Conference on Advances in Microfluidics and Nanofluidics and Asia-Pacific International Symposium on Lab on Chip, Singapore, 2011 (Guest Editors: Zhiping Wang and Charles Yan Chun)
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3365338/
https://ncbi.nlm.nih.gov/pubmed/22662086
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3673260
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