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Dynamic response of a cracked atomic force microscope cantilever used for nanomachining
The vibration behavior of an atomic force microscope [AFM] cantilever with a crack during the nanomachining process is studied. The cantilever is divided into two segments by the crack, and a rotational spring is used to simulate the crack. The two individual governing equations of transverse vibrat...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Springer
2012
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3331827/ https://ncbi.nlm.nih.gov/pubmed/22335820 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-131 |
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